Salahaddin University-Hawler, College of Education, Physics Department, KRG. Department of Library Science, Tishik International university, KRG, Erbil
The two-term solution of Boltzmann equation has been used to evaluated the electron energy distribution function (EEDF) and electron transport parameters in pure electronegative gas CHF3 for a wide range of E/N varying from 0.1 to 200 Td (1 Td=10-17 V.cm2). This parameters, are electron drift velocity, mean electron energy, characteristic energy, electron temperature, ionization coefficient, attachment coefficient, effective ionization coefficient and reduced critical electric field strength (E/N)cr.. The present calculated results are in good agreements as compared with the previous experimental and theoretical results. A set of elastic and inelastic cross-sectionare collected for CHF3 gas to evaluated transport parameters over the entire E/N range.